prof. RNDr. Ivan Ohlídal, DrSc.

2020

• Spectroscopic ellipsometry of inhomogeneous thin films exhibiting thickness non-uniformity and transition layers

  OHLÍDAL Ivan VOHÁNKA Jiří BURŠÍKOVÁ Vilma FRANTA Daniel ČERMÁK Martin

  Article in Periodical

  Optics Express, year: 2020, volume: 28, edition: 1, DOI

2019

• Approximate methods for the optical characterization of inhomogeneous thin films: Applications to silicon nitride films

  OHLÍDAL Ivan VOHÁNKA Jiří FRANTA Daniel ČERMÁK Martin ŽENÍŠEK Jaroslav VAŠINA Petr

  Article in Periodical

  Journal of Electrical Engineering, year: 2019, volume: 70, edition: 7, DOI

• Approximations of reflection and transmission coefficients of inhomogeneous thin films based on multiple-beam interference model

  OHLÍDAL Ivan VOHÁNKA Jiří MISTRÍK Jan ČERMÁK Martin VIŽĎA František FRANTA Daniel

  Article in Periodical

  Thin Solid Films, year: 2019, volume: 692, edition: 31 December 2019, DOI

• Combination of spectroscopic ellipsometry and spectroscopic reflectometry with including light scattering in the optical characterization of randomly rough silicon surfaces covered by native oxide layers

  OHLÍDAL Ivan VOHÁNKA Jiří ČERMÁK Martin FRANTA Daniel

  Article in Periodical

  Surface Topography: Metrology and Properties, year: 2019, volume: 7, edition: 4, DOI

• Efficient method to calculate the optical quantities of multi-layer systems with randomly rough boundaries using the Rayleigh Rice theory

  VOHÁNKA Jiří ČERMÁK Martin FRANTA Daniel OHLÍDAL Ivan

  Article in Periodical

  Physica Scripta, year: 2019, volume: 94, edition: 4, DOI

• Optical characterization of inhomogeneous thin films containing transition layers using the combined method of spectroscopic ellipsometry and spectroscopic reflectometry based on multiple-beam interference model

  OHLÍDAL Ivan VOHÁNKA Jiří BURŠÍKOVÁ Vilma ŽENÍŠEK Jaroslav VAŠINA Petr ČERMÁK Martin FRANTA Daniel

  Article in Periodical

  Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics, year: 2019, volume: 37, edition: 6, DOI

• Optical Characterization of Non-Stoichiometric Silicon Nitride Films Exhibiting Combined Defects

  VOHÁNKA Jiří OHLÍDAL Ivan OHLÍDAL Miloslav ŠUSTEK Štěpán ČERMÁK Martin ŠULC Václav VAŠINA Petr ŽENÍŠEK Jaroslav FRANTA Daniel

  Article in Periodical

  Coatings, year: 2019, volume: 9, edition: 7, DOI

• Optical properties of the crystalline silicon wafers described using the universal dispersion model

  FRANTA Daniel VOHÁNKA Jiří BRÁNECKÝ Martin FRANTA Pavel ČERMÁK Martin OHLÍDAL Ivan ČECH Vladimír

  Article in Periodical

  Journal of Vacuum Science & Technology B, year: 2019, volume: 37, edition: 6, DOI

• Temperature dependent dispersion models applicable in solid state physics

  FRANTA Daniel VOHÁNKA Jiří ČERMÁK Martin FRANTA Pavel OHLÍDAL Ivan

  Article in Periodical

  Journal of Electrical Engineering, year: 2019, volume: 70, edition: 7, DOI

2018

• Determination of thicknesses and temperatures of crystalline silicon wafers from optical measurements in the far infrared region

  FRANTA Daniel FRANTA Pavel VOHÁNKA Jiří ČERMÁK Martin OHLÍDAL Ivan

  Article in Periodical

  Journal of Applied Physics, year: 2018, volume: 123, edition: 18, DOI