Project information
The Langmuir probe method for diagnostic of low-temperature plasma in technological applications
- Project Identification
- GA202/97/1011
- Project Period
- 1/1997 - 1/1999
- Investor / Pogramme / Project type
-
Czech Science Foundation
- Standard Projects
- MU Faculty or unit
- Faculty of Science
- Cooperating Organization
-
Charles University
- Responsible person prof. RNDr. Milan Tichý, DrSc.
The probe method is still the often used diagnostic method in technological applications of low-temperature plasma. The plasma parameters evalsuated from the probe data are, however, often inaccurate due to the fact that for the real condition of a parti cular application (e.g. the higher pressure or the presence of a magnetic field) the appropriate probe theory is not available. The presented grant proposal will solve the problem of charged particles collection by Langmuir probe in isothermal as well as