Project information
Application of the probe and mass-spectrometric methods to the study of the elementary processes in low-temperature and technologically oriented plasma

Investor logo
Project Identification
GA202/00/1689
Project Period
1/2000 - 1/2002
Investor / Pogramme / Project type
Czech Science Foundation
MU Faculty or unit
Faculty of Science
Cooperating Organization
Charles University

We shall further develop experimentally and theoretically the Langmuir probe method with the aim to interpret the data from probe measurements also at more complicated conditions typical for plasma-chemical reactors. It is envisaged to utilise the result s of the preceding grant of the Grant Agency of the Czech Republic (GACR) and to continue in the study of the direction-resolved distribution function of electrons in magnetron plasma and its comparison with the theoretical model. We also aim at modellin g the charged particles motion in the glow discharge in the cylindrical magnetron system with the goal to more deeply understand the processes going on in technologically oriented plasma-chemical systems. Further it will be developed the probe theory at medium pressures of the order of units of kPa, especially by using the Monte Carlo and the Particle-In-Cell models. The models will be compared with experiments with the goal to work out the probe method for measurement of the positive and the negative i

Publications

Total number of publications: 1


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